양방향 광 송수신 모듈, 광 송수신 장치 및 양방향 광송수신 모듈 제조 방법

Bidirectional optical transmitting/receiving module, optical transmitting/receiving device, and bidirectional optical transmitting/receiving module manufacturing method

Abstract

A bidirectional optical transceiving module, an optical transceiving apparatus, and a manufacturing method for the bidirectional optical transceiving module are provided to form a flat end surface to enable a dielectric multilayer filter formed in the end surface to have a high performance demultiplexing characteristic, thereby providing a high performance bidirectional optical transceiving module in which transmitted light is not mixed with received light. A bidirectional optical transceiving module includes a light emitting element(4), a bidirectional optical waveguide(2), and a dielectric multilayer filter(3). The light emitting element performs simultaneous bidirectional communication with light of two wavelengths by using a single-core optical fiber(6). The bidirectional optical waveguide is formed on a substrate(1) and is coupled to the light emitting element. The dielectric multilayer filter is formed on a folded-structure end surface(12) of the optical waveguide. The dielectric multilayer filter has a characteristic of reflecting light transmitted from the light emitting element and a characteristic of transmitting light received from the outside. The folded-structure end portion surface of the optical waveguide is disposed at a position receded to an inside for an end surface of the substrate.
V자형 광 도파로 및 유전 다층필터를 이용하는 역다중화 장치를 포함한 저렴하고 양호한 특성의 양방향 광 송수신 모듈 등을 제공한다. 유전 다층막이 형성된 단부면의 형성과 광학 모듈들의 분할이 별도의 단계로 수행되며, 유전 다층필터가 형성된 V자형 광 도파로의 교차부에 단부면이 높은 평활도를 달성하기 위한 건식 에칭에 의해 형성된다. 또한, 광학 모듈의 절단면은 적어도 3 ㎛만큼 단부면에서 분리된 위치에 설정된다. 이를 통해, 평활 단부면이 발광 소자 분할 단계에 의해 야기된 절단면의 요철로부터 보호되고 유전 다층필터가 단부면에 형성된다.

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